Mass production
For polishing and planarization of wafer production series, Alpsitec CMP has developed highly automated machines (multi-loading trays, transfer, control …), high precision and easy to implement.
CMP machines Pcox 202-203-204
- Advanced technologies (range Pcox)
- Module autoloader (6-axis industrial robot)
- Possibility of continuous operation
- Transfer Module
- Polishing module
- high scalability
- high productivity
- high flexibility
