E460 data sheet
| Dimensions | Width | 800 mm (2.62 feets) |
| Depth | 1353 mm (4.57 feets) | |
| Height | 2000 mm (6.97 feets) | |
| Weight | 800 kg (1765 lb) | |
| Wafer dimensions | Ø 1″-8″ | |
| Surface | 1,08 m2 ( 11.97 sq.feets) | |
| Facilities | Voltage | 220-380V, 3-phase / 50-60 Hz |
| Compressed air | 6-7 bar, 5 bar (min.) | |
| Water | 1 bar | |
| Head motor | 0.37 kW | |
| Platen motor | 2.2 kW | |
| Consumption | DI-Water | 20 liter/h |
| Compressed air (incl.Sweeping motion) |
80 liter/h | |
| Electricity | 3 kW | |
| Vacuum | Internal vacuum pump |
Specification data are subject to change due to design evolutions.