Pcox 200s
Advantages
- Price
- Small, easy-to-use, robust
- Direct transfer of processes developed on the Pcox200 S to a Pcox20X production machines
- Possible and easy evolution of a Pcox200 S module into a Pcox20X machine ensuring long tool life without obsolescence.
Using
The Pcox 20X range presents a series of modular machines which offers configurations including 2, 3 or 4 polishing modules.
The Pcox 200 S is one of these modules used in stand-alone form for process development It offers all the specifications of the production machine :
- Complete control by computer and PLC
- Automatic loading and unloading of the polishing head
- Ten polishing steps
- Standard 200 mm
- Compatibility 4 “to 8”
- Ex-situ and in-situ conditioning
- Integrated slurry pump
- Unique quick exchange of platen, polishing carriers and conditioning tools.
Its structure offers the same productivity specifications as a module included in a Pcox20X machine although with manual loading of the wafer to save space and cost.